WikiCards · Card list · Science cards · Inverse lithography
Common card · Science
Inverse lithography, a Common card
In semiconductor device fabrication, the inverse lithography technology is an optical proximity correction approach to optimize photomask design.
- Rarity
- Common
- Domain
- Science
- ATK
- 37
- DEF
- 16
- Power
- 53
- Wikipedia reads a year
- 2,900
Power 53 (ATK + DEF): stronger than 5 % of WikiCards cards.
The facts on the card
The card carries these facts from its Wikipedia article.
- It is basically an approach to solve an inverse imaging problem: to calculate the shapes of the openings in a photomask so that the passing light produces a good approximation of the desired pattern on the illuminated material, typically a photoresist.
- As such, it is treated as a mathematical optimization problem of a special kind, because usually an analytical solution does not exist.
- In conventional approaches known as optical proximity correction, a "target" shape is augmented with carefully tuned rectangles to produce a "Manhattan shape" for the "source", as shown in the illustration.
Why it is Common
Rarity in WikiCards follows a year of Wikipedia page views: the most read articles become Epic and Legendary cards. The Inverse lithography article was read about 2,900 times in a year. ATK comes from the length of the article and DEF from its quality, so this card hits with 37 and blocks with 16: each hit it takes is cut by 6 %.
How to get Inverse lithography
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Credits
Text : Wikipedia, Inverse lithography (revision), CC BY-SA 4.0. Photo : LithoGuy ( talk ), Public domain, Wikimedia Commons.